Spatially Resolved Layer Thickness Analysis of Coatings

This technical report details the analysis of a glass substrate coated with a copper-aluminum layer using micro-XRF spectrometry. The objective is to determine the layer thickness and the Cu:Al ratio across the sample. The report outlines the functional principle of X-ray fluorescence, which allows for the analysis of thin layers by measuring the characteristic X-ray fluorescence induced by the X-rays as they penetrate the material. The measurements were conducted using a Bruker M4 TORNADO, which combines high spatial resolution with fast data processing. The report describes the measurement conditions and the analytical task, which involved a spatially resolved quantitative analysis of the thin metallic layer. Results from both high-resolution mapping and multi-point measurements are presented, showing the layer thickness gradient and elemental distribution. The findings indicate that both analytical approaches yield consistent layer thickness values, demonstrating the effectiveness of the M4 TORNADO with the XMethod tool for analyzing thin metallic layers.