Integration of ToolCommander for ALD Equipment Control

This document is a success story detailing the integration of the ToolCommander® software framework by Kontron AIS for Beneq Oy's Atomic Layer Deposition (ALD) equipment. The project aimed to control the ALD equipment effectively while ensuring high software quality and facilitating easy commissioning. The challenges included supporting both single wafer batch and batch processing, as well as developing custom horizontal and vertical interfaces. The solution involved the delivery of the ToolCommander® control software within the specified time and budget. The system, which includes a heater, loadlock, transfer module, and process module, was pre-tested at Beneq's headquarters in Espoo, Finland, before being shipped to China for OLED microdisplay production. The integration utilized the Beckhoff PLC and the TwinCAT protocol for communication, allowing for seamless control of various components. Additionally, a custom host integration protocol was developed to meet the specific needs of the end customer in China.