Digital Twins in Semiconductor Manufacturing Overview

This white paper discusses the adoption and implementation of Digital Twin (DT) technology in the semiconductor manufacturing industry. It outlines the concept of a Digital Twin as a virtual representation of physical assets, processes, and entire manufacturing systems, synchronized with real-time data. The paper details the benefits of DTs, including improved decision-making, reduced risk, increased innovation, and enhanced operational efficiency. It also addresses the current status of DT technology in the industry, highlighting the challenges faced in development, such as data acquisition, model complexity, and real-time synchronization. Furthermore, the document presents a structured taxonomy of DTs and their hierarchical levels relevant to various applications in semiconductor manufacturing. The insights are based on findings from a recent SEMI workshop, aiming to provide a comprehensive understanding of DTs and their potential to drive advancements towards AI-driven autonomous factories. Recommendations for next steps in the development and deployment of DT technology are also included.