Design Methodology for Enhanced Sensitivity in Resonant Sensors

This technical report presents a design methodology aimed at improving the sensitivity of resonant sensors through specific geometrical modifications to their resonant elements and force-multiplier mechanisms. The methodology focuses on altering the boundary conditions of resonant beam sensing elements to enhance their responsiveness to axial forces, as well as optimizing force-multiplier mechanisms to exceed the basic capabilities of traditional lever structures. The effectiveness of these modifications is validated through simulations and experimental testing of fabricated test structures, including resonant accelerometers. The results indicate a significant increase in device sensitivity, with experimental data showing a 35% improvement compared to baseline designs. The proposed approach maintains compatibility with existing microfabrication processes, allowing for performance enhancements across various devices through straightforward structural adjustments. The report details the design principles, experimental setups, and comparative analyses of different resonant accelerometer designs, emphasizing the advancements achieved through the innovative design strategies employed.