Leveraging Smart Factory Principles for Chemical Efficiency

This technical report discusses the implementation of smart factory principles to enhance chemical usage efficiency and reduce costs in semiconductor manufacturing. The study focuses on the integration of flow sensors and a fault detection and classification (FDC) system to optimize solvent processes, specifically metal liftoff and photoresist strip operations. By employing these technologies, the research identifies and addresses chemical loss mechanisms, such as unnecessary wet station top-offs and end-of-life valves. The results indicate significant reductions in both chemical usage and costs, demonstrating the effectiveness of the smart factory approach in achieving sustainability and operational efficiency. The findings suggest that the methodologies applied in this study can be broadly utilized across various process areas and industries, highlighting the potential for widespread adoption of smart factory principles to tackle similar challenges in manufacturing environments.