Air Pollution Control Technology Implementation Report

This technical report outlines the air pollution control strategies implemented by TSMC to minimize emissions from semiconductor manufacturing operations. The document details the adoption of Best Available Technology (BAT) aimed at reducing unit air pollutant emissions by significant percentages, with specific targets set for volatile organic gases. It describes the multi-phase treatment processes employed, including the use of local scrubbers and central treatment facilities, to effectively manage and reduce various types of air pollutants. The report also highlights the monitoring systems in place to ensure the proper functioning of air pollution control equipment, aiming for minimal abnormal occurrences. Additionally, it presents the historical emissions data, reduction rates achieved, and the ongoing efforts to enhance the performance of air pollution control technologies. The strategies outlined are applicable to TSMC fabs worldwide, emphasizing the company's commitment to sustainable practices and environmental responsibility.